With the increasing demand for high-performance optoelectronic devices in fields such as 5G communication, new energy vehicles, and wearable electronics, the technological advantages of ultrasonic spraying of barium titanate thin films are becoming increasingly prominent. Future development will focus on combining barium titanate with nanomaterials such as graphene and carbon nanotubes to prepare multifunctional thin films and to manufacture large-area flexible device roll-to-roll spraying production lines.
Barium titanate (BaTiO₃) powder, due to its excellent ferroelectric, piezoelectric, dielectric, and photoelectric response properties, is a core functional material in the field of optoelectronic devices. Shanghai Yangmi's ultrasonic spraying technology, with its advantages of high coating uniformity, high raw material utilization, and strong controllability of film thickness, has become the preferred process for preparing functional barium titanate thin films. The combination of these two technologies can significantly improve the performance and stability of optoelectronic devices.
Advantages of Ultrasonic Spraying Technology:
1. High Coating Uniformity, No Pinhole Defects:
Ultrasonic spraying atomizes barium titanate slurry into micron-sized droplets through high-frequency vibration. The droplet size distribution is narrow and the flight trajectory is stable, allowing the thickness deviation of the deposited film to be controlled within ±5%. This avoids problems such as coating agglomeration, pinholes, and cracking that are common in traditional spraying methods (e.g., air spraying), ensuring uniform dielectric and piezoelectric properties of the barium titanate film.
2. High Raw Material Utilization, Cost Savings:
Compared to spin coating and sputtering processes, ultrasonic spraying achieves a raw material utilization rate of over 70%, far exceeding the 30%-40% of spin coating. For high-cost barium titanate nanopowders, this significantly reduces raw material waste, making it particularly suitable for large-scale production.
3. Precise and controllable film thickness, adaptable to different device requirements
By adjusting parameters such as spraying speed, slurry concentration, and nozzle movement trajectory, the thickness of barium titanate films can be precisely controlled from tens of nanometers to tens of micrometers, meeting the differentiated requirements of various optoelectronic devices (such as thin-film capacitors, piezoelectric sensors, and photodetectors) for functional layer thickness.
4. Strong low-temperature process compatibility, protecting substrate materials
Ultrasonic spraying can complete film formation at room temperature to medium-low temperatures (<300℃), requiring only low-temperature annealing to achieve the oriented growth of barium titanate crystals. This characteristic is suitable for flexible substrates (such as PET, PI) or high-temperature-sensitive semiconductor substrates (such as silicon wafers, GaN substrates), expanding the application scenarios of devices.
