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The ultrasonic spraying system, ultrasonic spray pyrolysis and spray drying system can provide effective solutions for the preparation of nano film coating and nano ultrafine powder. The ultrafine powders preparation system of ultrasonic spray pyrolysis can prepare various ultrafine powders such as metal oxides and ceramics, and nanometer carbon materials such as carbon fibers and carbon spheres. The ultrasonic spraying system can prepare various nanometer functional film coatings, such as transparent conductive film, superhydrophobic coating, AR anti-reflection and anti-reflection film, TCO and so on.